Maintenance; Storage - Advanced Energy FC-77 Series User Manual

MAINTENANCE

Recalibration and repair should be performed by Advanced Energy. See
Services" on page 5-6
Note: Removal of an MFC should be done only after adequate purging with a
nonreactive gas such as nitrogen gas (N
procedures for removing gas line components.
Reactive gas calibrated MFCs may receive severe contamination or
corrosion from exposure to air or moisture. Check plumbing for leaks,
and purge thoroughly with dry nitrogen before operating or
disconnecting from the system.

STORAGE

Observe the following requirements when placing an MFC in storage:
• Temperature between 5ºC (41ºF) and 45ºC (113ºF)
• Relative humidity less than 60%
Additionally, prevent any mechanical impact or corrosion.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
for contact information.
Installation and Operation
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