Advanced Energy FC-77 Series User Manual page 44

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Advanced Energy
Table 4-2. 9-pin connector signal descriptions
Pin
1 VALVE
OPEN/
CLOSED
2 OUTPUT
3 +15 VDC
4 POWER
COMMON
5 -15 VDC
6 SET POINT
7 SIGNAL
COMMON
4-6
Signal
Name
This signal controls the position of the control
valve and allows you to use the purge function on
the MFC.
• Open = Common or +15 VDC
• Closed = -15 VDC
• Normal = Floating
For more information, see
Function Signals" on page
Note: Complete shut off of a gas cannot be
achieved by the control valve of an MFC.
Analog flow output signal. The signal range is
0 VDC to 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
For specifications on this signal, see the supply
power section of the specifications table for the
specific MFC model (see
on page 6-1).
Common line that carries the majority of the MFC
operating current.
Note: POWER COMMON (pin 4) and SIGNAL
COMMON (pins 7 and 8) must be connected
at the power supply.
For specifications on this signal, see the supply
power section of the specifications table for the
specific MFC model (see
on page 6-1).
Analog flow control signal. The signal range is
0 VDC to 5 VDC:
• 0 VDC = 0%
• 5 VDC = 100% of full-scale flow
Return for control signals.
Note: POWER COMMON (pin 4) and SIGNAL
COMMON (pins 7 and 8) must be connected
at the power supply.
I/O Connections and Communication
Signal Description
"Control Valve Purge
4-8.
"Model Specifications"
"Model Specifications"
5700512-C