Chapter 2. Product Overview; Product Description And Theory Of Operation; Figure 2-1. Mfc Cutaway View - Advanced Energy FC-77 Series User Manual

Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Product Overview
PRODUCT DESCRIPTION AND THEORY OF
OPERATION
The MFC provides analog control, an array of possible mechanical and electrical
connections, and a wide variety of flow ranges. As shown in
(mass flow controller) is composed of a PC board that is integrated with the following
sections:
• Flow and temperature sensor
• Bypass
• Electronics
• Control valve
PC board
Sensor
Gas inlet

Figure 2-1. MFC cutaway view

5700512-C
Control
Valve
Gas outlet
Base
Bypass
Product Overview
Chapter Chapter
2
Figure 2-1, the MFC
2-1