Specifications For Model Fc-7800 Mfcs; Table 6-25. Specifications For Fc-7800 Series Mfcs - Advanced Energy FC-77 Series User Manual

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Specifications for Model FC-7800 MFCs

The following table lists specifications for the FC-7800 MFCs.

Table 6-25. Specifications for FC-7800 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-26
FC-7800 FC-7800C
Normally
open
Maximum ±2% of full scale, within 1 s
Maximum at ±0.2% of full scale
Maximum 1 x 10
49 to 275 kPa(D); 7 to 40 psi(D)
Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
SUS316, SUS316L, PTFE, Ni, KM-45
1/4" VCR, 1/4" SW
Specifications and Reference Information
FC-7800CD
10 sccm to 5000 sccm
Normally closed
Maximum ±1% of full scale
Maximum ±0.5% of full scale
-11 3
[Pa*m /sec(He)]
5% to 100%
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Maximum 3.1 W
Any direction
1.2 kg (2.6 lb)
FC-7800CU
1/4" VCR
5700512-C