Specifications For Model Fc-7720 Mfcs; Table 6-24. Specifications For Fc-7720 Series Mfcs - Advanced Energy FC-77 Series User Manual

Specifications for Model FC-7720 MFCs

The following table lists specifications for the FC-7720 MFCs.

Table 6-24. Specifications for FC-7720 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Note 4
Standard fitting
Mounting position
Weight
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE may be required, depending on the intended flow rate range.
Note 4—3/8" VCR fitting or 3/8" UJR fitting is required if 100 slm or more is derived from full-scale
range (N equivalent).
2
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
FC-7720
Normally open
Maximum ±2% of full scale, within 4 s
Note 3
SUS316, SUS316L, PTFE, KM-45, Viton, or Chloroprene rubber
1/4" VCR, 1/4" SW, 3/8" VCR, 3/8" SW
Specifications and Reference Information
FC-7720C, FC-7720CD
35 slm to 150 slm
Maximum ±2% of full scale
Maximum ±1% of full scale
Maximum at ±0.2% of full scale
-7 3
Maximum 1 x 10 [Pa*m
2% to 100%
147 to 275 kPa(D); 21 to 40 psi(D)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Maximum 3.7 W
Any direction
2.3 kg (5.1 lb)
Normally closed
/sec(He)]
6-25