Advanced Energy FC-77 Series User Manual page 14

Mass flow controllers
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Advanced Energy
Table 6-33. Dimensions for standard models in mm (and inches) . . . . . . . . . . . . . . . 6-34
Table 6-34. Dimensions for block-type models in mm (and inches) . . . . . . . . . . . . . . 6-37
Table 6-35. Dimensions of high temperature MFC units in mm (and inches) . . . . . . . 6-38
Table 6-36. Dimensions of high temperature PCB units in mm (and inches) . . . . . . . 6-38
Table 6-37. Calibration references . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
xiv
List of Tables
5700512-C

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