Safety Guidelines - Advanced Energy FC-77 Series User Manual

®
Advanced Energy

SAFETY GUIDELINES

Review the following information before attempting to install and operate the product.
Do not attempt to install or operate this equipment if you have not first
reviewed this manual.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
• Do not install substitute parts or perform any unauthorized modification to the
MFC.
• Service and repair the MFC only at authorized service centers to ensure that all
safety features are maintained.
• Do not remove MFC covers. Component replacement and internal adjustments
must be made by qualified service personnel only.
• If hazardous materials are used, observe the proper safety precautions, completely
purge the MFC when necessary, and ensure that the material used is compatible
with sealing materials.
• After installing the MFC, or before its removal from a system, purge the MFC
completely with a clean, dry gas to eliminate all traces of the previously used flow
material.
• This MFC should be purged by qualified personnel following standard company
procedures.
• Do not operate this product in an explosive environment.
• Ensure that all MFC fittings are consistent with MFC specification and
compatible with the intended use of the MFC.
• Before proceeding with the MFC setup, carefully check all plumbing connections
to ensure leak-tight installation.
• Never operate this MFC at pressures higher than the rated maximum pressure.
(Refer to
specifications.)
1-6
"Model Specifications" on page 6-1
Safety and Product Compliance Guidelines
for maximum allowable pressure
5700512-C