Chapter 3. Installation And Operation; Preparing To Install The Unit; Installation Requirements - Advanced Energy FC-77 Series User Manual

Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Installation and Operation

PREPARING TO INSTALL THE UNIT

The following sections provide information that you need to understand before
installing the MFC.

Installation Requirements

Install the MFC according to the following requirements.
Operating and maintenance personnel must receive proper training
before installing, troubleshooting, or maintaining this equipment.
• Do not use this product for medical or life-support purposes.
• Use the appropriate tube size for the MFC fitting.
The MFC does not come with mounting screws and gaskets. The selection and
preparation of appropriate screws and gaskets is your responsibility.
Note: For product and attachment dimensions, see
page
• Connect the MFC with the gas flowing in line with the arrow marked on the front
of the MFC.
• Make the electrical connection according to the instructions in
Electrical Connection" on page
• Use optional functions such as error detection and the purge function according to
the relevant instructions.
• Perform the gas connector leak test with a helium leak detector.
Note: For models with a normally closed control, perform the leak test with the
valve open (by providing a set point voltage to the MFC).
• After power on, warm up the MFC for at least 15 minutes before supplying gas.
5700512-C
6-33.
3-5.
Installation and Operation
"MFC Dimensions" on
"Making the
Chapter Chapter
3
3-1