Specifications For Model Fc-780 Mfcs; Table 6-5. Specifications For Fc-780 Series Mfcs - Advanced Energy FC-77 Series User Manual

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Specifications for Model FC-780 MFCs

The following table lists specifications for the FC-780 MFCs.

Table 6-5. Specifications for FC-780 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the ser-
vice gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
6-6
FC-780
Normally open
Maximum ±2% of full scale, within 1 s
Maximum at ±0.2% of full scale
Maximum 1 x 10
49 to 275 kPa(D); 7 to
40 psi(D)
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
SUS316, SUS316L, PTFE, Ni, KM-45
1/4" VCR, 1/4" SW,
1/4" MCG, 1/4" S-JSK
Current output (0 mA to
2.5 mA), error detection
function, TC surface
treatment
Specifications and Reference Information
FC-780C
10 sccm to 5000 sccm
Normally closed
Maximum ±1% of full scale
Maximum ±0.5% of full scale
-11 3
[Pa*m /sec(He)]
2% to 100%
29.4 to 294 kPa(D); 4 to
43 psi(D)
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Maximum 3.1 W
1/4" VCR, 1/4" SW,
Any direction
1.2 kg (2.6 lb)
Current output (0 mA to
2.5 mA), error detection
function, TC surface
treatment, 1/4" VCO fitting
5700512-C