Specifications For Model Fc-772 Mfcs; Table 6-3. Specifications For Fc-772 Series Mfcs - Advanced Energy FC-77 Series User Manual

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Specifications for Model FC-772 MFCs

The following table lists specifications for the FC-772 MFCs.

Table 6-3. Specifications for FC-772 series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE may be required, depending on your intended flow rate range.
6-4
FC-772
Normally open
Within 3 s (typical) ±2% at 50% to 100% and 100% to 50%
Maximum 1 x 10
147 to 275 kPa(D); 21 to 40 psi(D)
Note 3
SUS316, SUS316L, PTFE, KM-45, Viton, or Chloroprene
1/4" VCR, 3/8" VCR, 1/4" SW, 3/8" SW
Current output (0 mA to 2.5 mA), error detection function,
1/4" VCO fitting, 3/8" VCO fitting, TC surface treatment
Specifications and Reference Information
35 slm to 150 slm
Normally closed
Maximum ±2% of full scale
Maximum ±1% of full scale
Maximum at ±0.2% of full scale
-7 3
[Pa*m /sec(He)]
2% to 100%
981 kPa(G); 142 psi(G)
5ºC to 45ºC (41ºF to 113ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Maximum 3.7 W
rubber
Any direction
2.6 kg (5.7 lb)
FC-772C
5700512-C