Advanced Energy FC-77 Series User Manual page 104

Mass flow controllers
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Advanced Energy
preparing to install 3-1
safety requirements 3-1
site preparation 3-3
unpack MFC 3-3
L
label
MFC label 6-40
labels on unit 1-5
leak test 3-6
M
maintenance 3-11
manual, see user manual
marking, CE 1-7
mechanical connections 3-4
MFC
bypass assembly 2-4
calibration references 6-39
components of 2-2
dimensions 6-33
electronics assembly 2-4
flow sensor assembly 2-3
general description 2-1
label 6-40
models covered by manual 1-1
packing to ship 5-10
reference information 6-39
specifications 6-1
theory of operation 2-1
valve assembly 2-4
zeroing 3-9
model numbers 1-1
model specifications 6-1
mounting the MFC 3-4
O
operation
first-time operation 3-9
zeroing the MFC 3-9
P
packing the MFC to ship 5-10
part number on label 6-40
peripheral equipment, connecting 3-6
physical dimensions 6-33
pin descriptions
20-pin connector 4-2
9-pin connector 4-5
positioning the MFC 3-3
ii
power supply requirements 3-5
product
certification 1-7
purge signal 4-8
R
reference information
calibration references 6-39
flow indication 6-39
MFC label 6-40
repair, returning MFCs for 5-10
requirements, power supply 3-5
return authorization number 5-11
returns
authorized 5-11
returning MFCs for repair 5-10
warranty statement 5-11
S
safety
conditions of use 1-7
guidelines 1-6
requirements for installation 3-1
service contact information 5-6
service, customer 5-6
set point, troubleshooting 5-3
shipping container 3-3
shipping the MFC 5-10
signal descriptions
20-pin connector 4-2
9-pin connector 4-5
size 6-33
specifications 6-1
subminiature-D connector 4-5
support, customer 5-6
symbols
in user manual 1-5
on unit 1-5
T
terminal descriptions
20-pin connector 4-2
9-pin connector 4-5
test, leak 3-6
theory of operation 2-1
troubleshooting
alarm/error signal 5-1
no gas 5-2
overview 5-1
procedures 5-1
Index
5700512-C

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