Advanced Energy FC-77 Series User Manual page 4

Mass flow controllers
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Advanced Energy
COPYRIGHT
This manual and the information contained herein is the proprietary property of
Advanced Energy Industries, Inc.
No part of this manual may be reproduced or copied without the express written
permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual
or its contents is strictly prohibited. Copyright
Inc. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by Advanced Energy
Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no
warranty of any kind whatsoever, either expressed or implied, with respect to the
information contained herein. Advanced Energy Industries, Inc. shall not be liable in
damages, of whatever kind, as a result of the reliance on or use of the information
contained herein.
PRODUCT USAGE STATEMENT
Read this entire manual and all other publications pertaining to the work to be
performed before you install, operate, or maintain this equipment. Practice all plant
and product safety instructions and precautions. Failure to follow instructions can
cause personal injury and/or property damage. If the equipment is used in a manner
not specified by the manufacturer, the protection provided by the equipment may be
impaired. All personnel who work with or who are exposed to this equipment must
take precautions to protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and
associated hazards, but it assumes no responsibility for the after-sale operation of
the equipment or the safety practices of the owner or user. This equipment produces
or uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.
NEVER DEFEAT INTERLOCKS OR GROUNDS.
iv
©
2006 Advanced Energy Industries,
5700512-C

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