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FC-77 Series
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Advanced Energy FC-77 Series User Manual page 13
Mass flow controllers
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
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Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
List of Tables
Table 1-1. Standard MFC model numbers
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Table 1-2. Block-type MFC model numbers
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Table 1-3. High temperature MFC model numbers
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Table 4-1. 20-pin connector signal descriptions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Table 4-2. 9-pin connector signal descriptions
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Table 5-1. AE Global Services locations (USA)
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Table 5-2. European sales and service offices
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Table 5-3. European sales representative contacts
. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-4. Middle East sales and service contacts
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-5. Pacific Rim sales and service offices
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Table 6-1. Specifications for FC-770 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Table 6-2. Specifications for FC-771 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Table 6-3. Specifications for FC-772 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Table 6-4. Specifications for FC-780HT series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Table 6-5. Specifications for FC-780 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Table 6-6. Specifications for FC-780X series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Table 6-7. Specifications for FC-781HT series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6-8. Specifications for FC-781 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6-9. Specifications for FC-782 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Table 6-10. Specifications for FC-785 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Table 6-11. Specifications for FC-785T-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-12
Table 6-12. Specifications for model FC-785X-B MFC
. . . . . . . . . . . . . . . . . . . . . . . . 6-13
Table 6-13. Specifications for FC-785Y-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-14
Table 6-14. Specifications for FC-786 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Table 6-15. Specifications for FC-786T-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-16
Table 6-16. Specifications for FC-786Y-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6-17. Specifications for FC-790 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6-18. Specifications for FC-791 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Table 6-19. Specifications for FC-795 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Table 6-20. Specifications for FC-795T-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-21
Table 6-21. Specifications for FC-796 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Table 6-22. Specifications for FC-7700 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Table 6-23. Specifications for FC-7710 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Table 6-24. Specifications for FC-7720 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Table 6-25. Specifications for FC-7800 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Table 6-26. Specifications for FC-7810 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Table 6-27. Specifications for FC-7820 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Table 6-28. Specifications for FC-7850Y-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . 6-29
Table 6-29. Specifications for FC-7810 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Table 6-30. Specifications for FC-7820 series MFCs
. . . . . . . . . . . . . . . . . . . . . . . . . 6-31
Table 6-31. Specifications for FC-7850Y-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . 6-32
Table 6-32. Specifications for FC-785Y-B series MFCs
. . . . . . . . . . . . . . . . . . . . . . . 6-33
5700512-C
List of Tables
xiii
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Table of Contents
Troubleshooting
Chapter 5. Troubleshooting and Global Customer Support
51
No Gas Is Being Supplied
52
Set Point and Flow Output Do Not Match
53
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow chart
55
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This manual is also suitable for:
Fc-78 series
Fc-79 series
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