Advanced Energy FC-77 Series User Manual page 103

Mass flow controllers
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A
AE customer support 5-6
AE web site 5-6
alarm output signal 4-7
authorization return number 5-11
authorized returns 5-11
C
calibration information 6-39
card edge connector 4-1
CE marking 1-7
certification 1-7
communication
20-pin connector 4-1
9-pin connector 4-5
alarm output signal 4-7
connections 4-1
control valve (purge) signal 4-8
components of MFC 2-2
conditions of use 1-7
connecting, see installation
connections
20-pin card edge 4-1
20-pin Honda 4-1
communication 4-1
,
electrical 3-5
4-1
ground 3-5
mechanical 3-4
peripheral equipment 3-6
contact information
AE Global Support 5-6
sales and service 5-6
control valve signal 4-8
customer support 5-6
customer support contact 5-6
D
description
bypass 2-4
electronics 2-4
flow sensor 2-3
general 2-1
valve 2-4
dimensions 6-33
DSub connector 4-5
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Index
E
electrical connections 3-5
electrical connector
9-pin subminiature-D 4-5
alarm output signal 4-7
control valve (purge) signal 4-8
signal descriptions 4-2
electronics
assembly 2-4
overview 2-4
error (alarm) output signal 4-7
F
first-time operation 3-9
flow
no gas, troubleshooting 5-2
reference information 6-39
unstable or insufficient, troubleshooting 5-4
flow sensor, description 2-3
G
gas flow, troubleshooting 5-2
general description 2-1
global customer support 5-6
ground connections 3-5
guidelines
safety 1-6
H
Honda connector 4-1
I
icons
in user manual 1-5
on unit 1-5
initial operation 3-9
installation
confirm MFC model 3-3
connecting to peripheral equipment 3-6
ground connections 3-5
leak test 3-6
making mechanical connection 3-4
mounting the MFC 3-4
positioning the MFC 3-3
Index
,
4-1
,
4-5
i

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