Advanced Energy FC-77 Series User Manual page 11

Mass flow controllers
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Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
List of Figures
Figure 2-1. MFC cutaway view . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Figure 2-2. MFC functional block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Figure 3-4. MFC zero point adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Figure 4-1. 20-pin card-edge connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Figure 4-2. 20-pin Honda connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4-3. 9-pin subminiature-D connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-4. Alarm connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4-5. Card edge purge function signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4-8. Honda 20-pin purge function connection . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4-11. 9-pin subminiature-D purge function connection . . . . . . . . . . . . . . . . . . 4-12
Figure 6-2. Dimensions of block-type MFC models . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37
Figure 6-3. Dimensions for high temperature MFC models . . . . . . . . . . . . . . . . . . . . 6-38
Figure 6-4. MFC label example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
5700512-C
List of Figures
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