Specifications For Model Fc-780Ht Mfcs; Table 6-4. Specifications For Fc-780Ht Series Mfcs - Advanced Energy FC-77 Series User Manual

Specifications for Model FC-
The following table lists specifications for the FC-780HT MFCs.

Table 6-4. Specifications for FC-780HT series MFCs

Specification
Full-scale range (N equivalent)
2
Valve type
Note 4
Response time
Note 1
Accuracy
Linearity
Repeatability
External leak rate
Flow rate control range
Operating pressure range
Note 2
Proof pressure
Operating temperature
Flow rate setting and output signal
Supply power
Power consumption
Gas-wetted surface material
Standard fitting
Mounting position
Weight
Options
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the ser-
vice gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—The range or response times may vary depending on the vapor or gas properties.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
780HT
FC-780HT
Normally open
Maximum ±2% of full scale,
within 2 s
MFC unit: 50ºC to 80ºC (122ºC to 176ºF)
Note 3
Either current output (0 mA to 2.5 mA) or error detection
Specifications and Reference Information
MFCs
10 sccm to 5000 sccm
Maximum ±2% of full scale,
Maximum ±1% of full scale
Maximum ±0.5% of full scale
Maximum at ±0.2% of full scale
-11
Maximum 1 x 10 [Pa*m
2% to 100%
49 to 275 kPa(D); 7 to 40 psi(D)
981 kPa(G); 142 psi(G)
PCB unit: 5ºC to 50ºC (41ºF to 122ºF)
0 VDC to 5.0 VDC
Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Maximum 3.1 W
SUS316, SUS316L, PTFE, Ni, KM-45
1/4" VCR, 1/4" SW
Any direction
1.3 kg (2.9 lb)
function, 1/4" MCG fitting
FC-780CHT
Normally closed
within 1 s
3
/sec(He)]
6-5