Testing The System For Leaks; Connecting The Mfc To Peripheral Equipment; Figure 3-1. Connection To Peripheral Equipment Using A Ro-Box Power Supply - Advanced Energy FC-77 Series User Manual

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Advanced Energy

Testing the System for Leaks

Do not use liquid leak detectors to leak test connections. They may
damage the MFC.
After installing the MFC in your system, you should test the leak integrity of the gas
connections with a helium leak detector.
Note: MFCs equipped with a normally closed control valve should be leak tested with
the valve open (by providing a set point voltage to the MFC). For more
information about setting the set point voltage, see
and Communication."
CONNECTING THE MFC TO PERIPHERAL
EQUIPMENT
The following illustrations provide guidance for connecting a MFC to peripheral
equipment. The illustrations list Aera part numbers for equipment.
Figure 3-1. Connection to peripheral equipment using a RO-Box power
3-6
supply
Installation and Operation
Chapter 4, "I/O Connections
5700512-C