Special Function Signal Descriptions; Alarm Output (Error Detection) Signals; Table 4-2. 9-Pin Connector Signal Descriptions - Advanced Energy FC-77 Series User Manual

Mass flow controllers
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Table 4-2. 9-pin connector signal descriptions

Pin
8
SIGNAL
COMMON
9
VALVE
TEST POINT

SPECIAL FUNCTION SIGNAL DESCRIPTIONS

The following sections provide detailed signal information for signals that are
dedicated to specific functions.

Alarm Output (Error Detection) Signals

Not all MFC models provide these signals. To see if your model provides alarm output
signals see the specifications for the MFC model in question (see
Specifications" on page
and Communication."
FC-77X and FC-77XX MFCs provide error detection as a standard feature. The
function is an option on some other models.
For MFCs with the error detection feature, the MFC provides alarm output if it detects
a difference between the flow rate set point and the actual flow rate for longer than
eight seconds.
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Signal
Name
See pin 7.
Test point signal indicating the position of the
control valve:
• Open = -13 VDC
• Closed = 0 VDC
6-1). For signal descriptions, see
I/O Connections and Communication
Signal Description
Chapter 4, "I/O Connections
"Model
4-7

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