Mounting The Mfc; Making The Mechanical Connections - Advanced Energy FC-77 Series User Manual

Mass flow controllers
Table of Contents

Advertisement

®
Advanced Energy

Mounting the MFC

Look to the following information to correctly mount the MFC.
Note: If you are using an MFC with IGS connections, you must make the mechanical
connections before mounting the MFC. See
Connections" on page 3-4
Note: The MFC may be retrofitted into any system because it has been manufactured
for drop-in replacement for all existing MFCs and is backward compatibility
with all older analog MFCs.
To Mount the MFC:
1. Match the mounting holes on the bottom of the MFC with those on the mounting
surface.
2. Using two #8-32 UNC-2B screws mount the MFC. Ensure it is securely attached
and will resist vibration from external sources.
See
"MFC Dimensions" on page 6-33
as the specifications of the MFC mounting footprint.

Making the Mechanical Connections

To make the mechanical connections for the MFC, connect the inlet and outlet fittings
of the MFC to the gas supply line. Depending on the fitting type, use one of the
following procedures to connect the MFC.
Note: See
"Model Specifications" on page 6-1
type.
To Make VCR Fitting Connections:
1. Verify the MFC is correctly mounted (see
2. Inspect the tubing, ferrules, and fittings for dirt, dust, contamination, or damage.
If necessary, replace damaged components and clean the tubing, ferrules, and
fittings in accordance with your company's procedures.
3. Insert associated tubing until it rests flush against the shoulder of the fitting.
4. Tighten nut to finger tight and then 1/8 of a turn past finger tight.
To Make IGS Connections:
1. Inspect the mounting blocks for dirt, dust, contamination, or damage.
If necessary, replace damaged components and fittings in accordance with your
company's procedures.
2. Insert appropriate metal seals for your seal type.
Note: Metal seals are not included with the MFC.
3-4
for more information.
for dimensional drawings of the MFC, as well
for more information about your fitting
"Mounting the MFC" on page
Installation and Operation
"Making the Mechanical
5700512-C
3-4).

Hide quick links:

Advertisement

Table of Contents
loading

This manual is also suitable for:

Fc-78 seriesFc-79 series

Table of Contents