®
Advanced Energy
To Adjust the MFC Zero Point:
1. Make sure that the MFC has reached ambient temperature.
2. Energize the MFC, then wait at least 15 minutes. During this time, make sure that
the ambient temperature remains constant and that the output stabilizes.
3. Close the shut-off valves upstream and downstream of the MFC to ensure that
there is no gas flow.
4. For normally closed MFCs set the set point signal to 0 V. For normally open
MFCs, set the set point signal to 5 V. For more information on the set point
command, see
5. Use a small, flat head screw driver to make the zero-point adjustment as shown in
Figure
Figure 3-4. MFC zero point adjustment
3-10
Chapter 4, "I/O Connections and Communication."
3-4.
Installation and Operation
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