Confirming The Mfc Model; Preparing The Installation Site; Unpacking The Mfc; Positioning The Mfc - Advanced Energy FC-77 Series User Manual

Mass flow controllers
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Confirming the MFC Model

Before you install the MFC, ensure that you have the correct model for your system
requirements. The part number, serial number, calibration gas, and full-scale flow are
listed on the label of the MFC. See
MFC label.

Preparing the Installation Site

Before installing the MFC, thoroughly clean, dry, and purge all piping associated with
the entire flow control system (in accordance with your company's procedures). The
MFC control valve is not capable of completely shutting off gas flow. You must
install another shut off valve downstream of the MFC to completely stop gas flow.

Unpacking the MFC

The MFC is manufactured in a cleanroom environment and delivered in
contamination-free packages. Unpack MFC products in a cleanroom.
Unpack and inspect the MFC carefully, looking for obvious physical damage. If no
damage is apparent, locate and save all documentation, and then proceed with the
installation procedures.
If you do see signs of shipping damage, contact Aera, an Advanced Energy company,
and the carrier immediately (see
information). Save the shipping container for submitting necessary claims to the
carrier.
Save any undamaged shipping materials in the event you must ship the MFC in the
future. For more information on shipping an MFC, see
Shipping" on page

Positioning the MFC

Position the MFC so the gas flow is in the direction of the arrow stamped on the MFC
base. The MFC can be mounted in any position, but the zero point may shift if the
MFC is mounted in a non-vertical position. Adjust the zero point in the intended
mounting position before running the MFC (see
more information).
5700512-C
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
"Product Label" on page 6-40
"AE Global Services" on page 5-6
5-10.
Installation and Operation
for an example
for contact
"Packing an MFC for
"Zeroing the MFC" on page 3-9
for
3-3

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