Amtech Axpert-Eazy Series Instruction Manual page 78

No. Parameter
GROUP-5: RETURN STEP FOR TABLE-1
G501 Return Step T1-
STP1
G502 Return Step T1-
STP2
G503 Return Step T1-
STP3
G504 Return Step T1-
STP4
G505 Return Step T1-
STP5
G506 Return Step T1-
STP6
G507 Return Step T1-
STP7
G508 Return Step T1-
STP8
G509 Return Step T1-
STP9
6
G510 Return Step T1-
STP10
G511 Return Step T1-
STP11
G512 Return Step T1-
STP12
G513 Return Step T1-
STP13
G514 Return Step T1-
STP14
G515 Return Step T1-
STP15
GROUP-6: RETURN STEP FOR TABLE-2
G601 Return Step T2-
STP1
G602 Return Step T2-
STP2
G603 Return Step T2-
STP3
G604 Return Step T2-
STP4
G605 Return Step T2-
STP5
G606 Return Step T2-
STP6
G607 Return Step T2-
STP7
Amtech
6-32
Unit Def Min Max
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
1 1 14
Res Description
1 Set return step for Table-1, Step-1.
1 Set return step for Table-1, Step-2.
1 Set return step for Table-1, Step-3.
1 Set return step for Table-1, Step-4.
1 Set return step for Table-1, Step-5.
1 Set return step for Table-1, Step-6.
1 Set return step for Table-1, Step-7.
1 Set return step for Table-1, Step-8.
1 Set return step for Table-1, Step-9.
1 Set return step for Table-1, Step-10.
1 Set return step for Table-1, Step-11.
1 Set return step for Table-1, Step-12.
1 Set return step for Table-1, Step-13.
1 Set return step for Table-1, Step-14.
1 Set return step for Table-1, Step-15.
1 Set return step for Table-2, Step-1.
1 Set return step for Table-2, Step-2.
1 Set return step for Table-2, Step-3.
1 Set return step for Table-2, Step-4.
1 Set return step for Table-2, Step-5.
1 Set return step for Table-2, Step-6.
1 Set return step for Table-2, Step-7.
WP