Amtech Axpert-Eazy Series Instruction Manual page 74

No. Parameter
E505 RSF Time T2-
STP5
E506 RSF Time T2-
STP6
E507 RSF Time T2-
STP7
E508 RSF Time T2-
STP8
E509 RSF Time T2-
STP9
E510 RSF Time T2-
STP10
E511 RSF Time T2-
STP11
E512 RSF Time T2-
STP12
E513 RSF Time T2-
STP13
E514 RSF Time T2-
6
STP14
E515 RSF Time T2-
STP15
GROUP-6: RSF FREQUENCY FOR TABLE-3
E601 Freq T3-STP1
E602 Freq T3-STP2
E603 Freq T3-STP3
E604 Freq T3-STP4
E605 Freq T3-STP5
E606 Freq T3-STP6
E607 Freq T3-STP7
E608 Freq T3-STP8
E609 Freq T3-STP9
E610 Freq T3-STP10
E611 Freq T3-STP11
E612 Freq T3-STP12
E613 Freq T3-STP13
E614 Freq T3-STP14
E615 Freq T3-STP15
GROUP-7: RSF TIME FOR TABLE-3
E701 RSF Time T3-
STP1
E702 RSF Time T3-
STP2
E703 RSF Time T3-
STP3
E704 RSF Time T3-
STP4
Amtech
6-28
Unit Def Min Max
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Hz 5.00 0.01 600
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Sec 10.0 0.1 6000.0
Res Description
0.1 Set time for Table-2, Step-5 for RSF function.
0.1 Set time for Table-2, Step-6 for RSF function.
0.1 Set time for Table-2, Step-7 for RSF function.
0.1 Set time for Table-2, Step-8 for RSF function.
0.1 Set time for Table-2, Step-9 for RSF function.
0.1 Set time for Table-2, Step-10 for RSF function.
0.1 Set time for Table-2, Step-11 for RSF function.
0.1 Set time for Table-2, Step-12 for RSF function.
0.1 Set time for Table-2, Step-13 for RSF function.
0.1 Set time for Table-2, Step-14 for RSF function.
0.1 Set time for Table-2, Step-15 for RSF function.
0.01 Set frequency for Table-3, Step-1.
0.01 Set frequency for Table-3, Step-2.
0.01 Set frequency for Table-3, Step-3.
0.01 Set frequency for Table-3, Step-4.
0.01 Set frequency for Table-3, Step-5.
0.01 Set frequency for Table-3, Step-6.
0.01 Set frequency for Table-3, Step-7.
0.01 Set frequency for Table-3, Step-8.
0.01 Set frequency for Table-3, Step-9.
0.01 Set frequency for Table-3, Step-10.
0.01 Set frequency for Table-3, Step-11.
0.01 Set frequency for Table-3, Step-12.
0.01 Set frequency for Table-3, Step-13.
0.01 Set frequency for Table-3, Step-14.
0.01 Set frequency for Table-3, Step-15.
0.1 Set time for Table-3, Step-1 for RSF function.
0.1 Set time for Table-3, Step-2 for RSF function.
0.1 Set time for Table-3, Step-3 for RSF function.
0.1 Set time for Table-3, Step-4 for RSF function.
WP