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Chapter 5
Connecting Using RS-232C Cable
Command format
■ Measurement command <MS command>
Acquire the current measured value.
* The same can be processed with the M, MEASURE command, which is in a ZS series format.
<Command format>
M
<Response format>
• Normal measurement (Task numbers 0 to 3)
(Example) -30.719923 mm
- The return value is right-aligned and 11 characters + delimiter.
- The unit of the measured values is nm.
- Spaces will fill any missing portion from the left.
- If the task number is omitted, the measured value displayed is acquired.
• Normal measurement (Task number 4)
(Example) TASK1 = -3.071992 mm, TASK2 = -2.998122 mm, TASK3 = 2.345678 mm,
• When measurement is not possible
-
ZW
5-14
User's Manual
S
CR
Space
Task number
-
3
0
TASK4 = 2.471249 mm
-
3
-
2
2
2
-
-
-
-
7
1
9
9
0
7
1
9
9
9
8
1
3
4
5
6
4
7
1
2
-
-
-
-
2
3 CR
,
9
2
,
2
2
7
8
,
4
9 CR
-
-
CR
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