Omron ZW Series User Manual page 213

Displacement sensor, confocal fiber type
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■ ZW-S40
Mirror α direction
30
20
10
0
-10
-20
-30
-6
-4
White ceramic α direction
30
20
10
0
-10
-20
-30
-6
-4
Slope angle
+5°
-5°
-2
0
2
4
6
Distance [mm]
Slope angle
+50°
-50°
-2
0
2
4
6
Distance [mm]
Mirror β direction
30
20
10
0
-10
Slope angle
+5°
-20
-5°
-30
-6
-4
-2
0
2
4
Distance [mm]
White ceramic β direction
30
20
10
0
-10
Slope angle
+50°
-20
-50°
-30
-6
-4
-2
0
2
4
Distance [mm]
Chapter 6
Sensor Head
6
6
ZW
6-7
User's Manual

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