Table 11.6 Cleaning And Decontamination - Edwards STP-L301 Series Instruction Manual

Turbomolecular pumps
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11.3.3
Cleaning and Decontamination
The method of cleaning and decontamination of the STP pump and STP control unit is
shown below.
Area
STP Pump
Exterior
Interior
STP
Exterior
Control unit
Interior
11.3.4
Inspecting for Deposit
Leaving the STP pump without removing the deposit may cause the STP
pump to be corroded beyond repair.
Deposit may have accumulated inside the STP pump depending upon the type of the vacuum
equipment installed to the STP pump.
An increase in the amount of deposit may lead to a malfunction of the STP pump.
Therefore, perform regular maintenance (once every 3 to 6 months).
Inspect the inside of the outlet port flange for adhesion of deposit while watching the outlet
port flange. If deposit has accumulated to some extent, an overhaul (cleaning) is required.
Contact Service office.
Note that the costs of troubleshooting problems resulting from deposit will be at your own
charge even during the warranty period.
If a problem resulting from deposit occurs inside the STP pump, hermetically seal the inlet
port, outlet port, purge port, and leak port flanges, and immediately return the pump to
Service office.
For the transport method, see Section 11.3.6, "Transporting for Repair or Overhaul".
◇ Contact with atmospheric air may cause a reaction of the deposit. DO NOT open
the STP pump to atmospheric air as much as possible.
STP-L301/L451 Series Instruction Manual

Table 11.6 Cleaning and Decontamination

Cleaning and Decontamination
Wipe with proper solvent (such as alcohol).
Clean off with a pure gas when dust has accumulated in the
connector.
When the label of the STP pump has been damaged, contact
Service office.
The decontamination (overhaul) in the STP pump is executed
in Service office. When overhaul is needed, contact Service
office.
Wipe with proper solvent (such as alcohol).
When dust has accumulated in the ventilation port, wipe off
or vacuum it with the cleaner. In this case, dust must not
enter in the STP control unit.
Clean off with a pure gas when dust has accumulated in the
connector.
When the label of the STP control unit has been damaged,
contact Service office.
The cleaning (overhaul) in the STP control unit is executed
in Service office. When overhaul is needed, contact Service
office.
11-11

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