STP-L301/L451 Series Instruction Manual
Turbomorecular pump Control Unit
MODEL: SCU-
SERIAL No.:
MANUFACTURING DATE:
WEIGHT:
kg
MANUFACTURED BY: Edwards Japan Limited.
CE
1078-1, Yoshihashi, Yachiyo-shi, Chiba, Japan
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注意
CAUTION
Figure 13.5 Label Affixing Positions for the STP Control Unit
13-8