Start Procedures; Stop Procedures - Edwards STP-L301 Series Instruction Manual

Turbomolecular pumps
Hide thumbs Also See for STP-L301 Series:
Table of Contents

Advertisement

STP-L301/L451 Series Instruction Manual
7.2

Start Procedures

Start the backing pump before or simultaneously with the start of the STP pump. Open the
vacuum valve located at the outlet port flange side after starting the backing pump.
◇ DO NOT open the vacuum valve without operating the backing pump. Depending
upon the type of the backing pump, doing so may cause a reverse flow of oil, which
could contaminate the inside of the STP pump.
◇ When start/stop operations are frequently performed, the STP pump may overheat.
Avoid doing so.
7.3

Stop Procedures

Close the vacuum valve located at the outlet port flange side just before or after stopping the
STP pump.
After closing the valve, stop the backing pump.
◇ DO NOT stop the backing pump without closing the vacuum valve. Depending upon
the type of the backing pump, doing so could cause a reverse flow of atmospheric
air into the STP pump, which may result in a malfunction.
◇ DO NOT stop the backing pump without closing the valve. Depending upon the type
of the backing pump, doing so may cause a reverse flow of oil, which could
contaminate the inside of the STP pump.
7-2

Advertisement

Table of Contents
loading

This manual is also suitable for:

Stp seriesStp-l451 series

Table of Contents