Table 11.1 Error Messages - Edwards STP-L301 Series Instruction Manual

Turbomolecular pumps
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LCD Message
CABLE
Incorrect connection of the
DISCONNECT
STP connection cable
Failure of the STP connection
cable
CONTROLLER OT
Overheating inside the STP
control unit
1)
2)
DISTURBANCE
Abnormal magnetic bearing
1)
2)
Excessive external vibration
(vibration of 100μm0-P or
more)
1)
2)
3)
DRIVER ERROR 1
Motor driver failure
DRIVER ERROR 2
DRIVER ERROR 3
DRIVER ERROR 4
DRIVER ERROR 5
DRIVER ERROR 6
DRIVER HF
Hall sensor error
DRIVER OC
Motor driver overcurrent
DRIVER OV
Motor driver overvoltage
DRIVER RA
STP pump overspeed
(detected in the range of
49,500 to 53,000 rpm)
DRIVER UV
Motor driver undervoltage

Table 11.1 Error Messages

Probable Cause
Ambient temperature
Insufficient cooling of the
STP control unit
The STP pump and the
STP control unit have
different serial numbers.
The cable length is
changed.
External vibration/impact 1)
Atmospheric air flows into
the STP pump
Foreign particles fall into
the STP pump
11-3
STP-L301/L451 Series Instruction Manual
Countermeasures
Connect the cable correctly.
If the cable connector is not
locked, lock it securely.
Contact Service office.
1)
Set the ambient
temperature to 40°C or
less.
2)
Remove obstacles from
the ventilation port.
If the air cooling fan is
broken, contact Service
office.
1)
Use the units having the
same serial number, or
perform tuning.
2)
Perform tuning.
Remove the external
vibration so as not to
transmit it to the STP
pump.
2)
Check piping.
3)
Install the pump in a way
that no foreign particles
fall into the pump.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Contact Service office.
Refer to
6.4.2
Malfunction
Information
6.2.1
6.2.3
11.3.1
9.1
9.1
4.3.4
4.3.4
4.3.1
Malfunction
Information
Malfunction
Information

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