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STP-L301/L451 Series Instruction Manual
11.2.5
Other Abnormalities
Table 11.4 Troubleshooting while the STP Pump is Rotating
Symptom
The STP pump stops
Insufficient ultimate
pressure
Probable causes
Failure of the backing
pump
Leakage of the piping
system
Residual molecules
11-8
Countermeasures
Check the past errors
referring to Section
11.2.2, "Displaying Past
Abnormalities/Errors and
Accumulated Running
Time".
Check the backing pump
for its capacity and start
state (use a pump with
the recommended
capacity or more).
Check the piping system
for leakage.
If the main composition is
H
or H
O, perform
2
2
baking; if it is other than
H
or H
O, clean the
2
2
inside of the vacuum
equipment.
(If gases remain inside
the STP pump, contact
Service office when it is
needed to be cleaned.)
Refer to
11.2.2
4.3.4
13.1
4.3.4
5.1
11.3.5
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Table of Contents
Troubleshooting
