Height Of Purge Port - Edwards STP-iS1607 Series Instruction Manual

3.6 Introducing N gas (for the STP pump equipped with purge port)
2
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N , introduce a dry N
2
valve (must be prepared by the customer) from the purge port.
When exhausting a gas which has low heat conductivity such as Ar gas, the temperature of rotor
blade will increase. Introduce a dry N
decrease the temperature of rotor blade and exhaust the large amount of Ar gas.
For instructions on how to introduce the purge gas, see Section 4.1.2.
STP-iS1607
Inlet port flange
K1
K2
STP-iS1607 Series Turbomolecular Pump
gas through the electromagnetic vent. valve, needle valve or similar
2
gas into the STP pump through the purge port in order to
2
K1/K2

Height of purge port

ICF203 ISO160F VG150
335 335 335
335 335 335
Figure 26 - Height of purge port
STP-iS1607S
ICF253 ISO200F VG200
333 295 295
333 295 295
gas or other gas
2
ISO250F
295
295
MT-94E-001-C
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