Connecting The Pump And Tms Valve - Edwards STP-XF803 Series Instruction Manual

STP-XF803/XF1303/XF813/XF1313 series Turbomolecular Pump
3.5.2

Connecting the pump and TMS valve

Connect the cooling water pipe to the TMS valve. Pay special attention to the port label on the cooling
water valve to connect proper port. Connect the NC side (or OUT side) of the TMS valve to the STP
pump, and COM side (or IN side) of the TMS valve to the equipment.
Always supply cooling water from IN①.
Use cooling water under the conditions in Section 3.7, "Condition for the TMS unit""
Note: Procure and connect the cooling water pipe and install the electromagnetic cooling water
valve at your site. The diameter of the valve is Rc1/4 (ISO standard).
Figure 5 - Water cooling pipe piping diagram
3
MT-92E-101-C
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