Table 13.1 Specifications Of The Stp Pump - Edwards STP-L301 Series Instruction Manual

13 Specifications and Accessories
13.1 Specifications of the STP Pump
Item
Inlet port flange
Flange size
*1
Outlet port flange
N
2
Pumping speed
He
*2
H
2
N
2
Compression ratio He
H
2
Ultimate pressure
Maximum working pressure
Allowable backing pressure
Flow rate of purge gas
Rated speed
Starting time
Stopping time
Vibration
Noise
Baking temperature
Lubricating oil
Installation position
Cooling method
Standard backing pump
Mass
Dimensions
Ambient temperature range
Storage temperature range
The values shown in the table are typical; they are not guaranteed.
*1
:ICF (JVIA standard), VG, KF (JIS)
*2
: At 48,000 rpm. The performance varies with the rated speed
STP-L301/L451 Series Instruction Manual

Table 13.1 Specifications of the STP Pump

ICF152/VG100/ISO100 ICF203/VG150/ISO160
L/s
L/s
L/s
Pa (Torr)
6.7×10
Pa (Torr)
Pa (Torr)
Pa•m /s
3
(SCCM)
rpm
min
min
μm O-P
dB
°C
(Water/air cooling: for baking/gas suction)
L/min
kg
mm φ180×240 (ISO100)
φ185×240(VG100)
φ180×260(ICF152)
°C
°C
13-1
STP-L301 series
KF25
260
260
290
>10
8
5×10
2×10
10 Order (10
-6
(5×10 )
: Natural air cooling
-2 -4
13 (0.1) : Natural air cooling
1.7×10
-2 （10）
25,000 to 48,000
3
3
< 0.001 (at 48,000 rpm)
< 50 (at 48,000 rpm)
<120
Not necessary
Free
Natural air cooling
240
13
φ214×250 (ISO160)
φ235×250(VG150)
φ214×270(ICF203)
0 to 40
– 25 to + 55
STP-L451 series
450
460
410
5
4
Order)
-8
14