Table 10.3 Safety Functions - Edwards STP-L301 Series Instruction Manual

STP-L301/L451 Series Instruction Manual
Operation state
Abnormality
of safety
/Error
functions
Power failure Power failure
time: 2 seconds
or longer.
Abnormal Rotor descends
magnetic onto the touch
bearing down bearing.
Excessive Rotor vibration:
vibration 100 μm 0-P or
more.
Overload of Excessive
motor driver current flows in
the motor.

Table 10.3 Safety Functions

LED
LCD
indication
"FAILURE" "POWER
illuminates. FAILURE"
"POWER"
extinguishes.
"FAILURE" "DISTURBANCE"
"FAILURE" "DISTURBANCE"
"FAILURE" "OVERLOAD"
REMOTE
State of the STP pump
output signal
"ALARM" The magnetic bearing
continues to operate using
"POWER ON" regenerative energy.
output cut-off The STP pump decelerates
and stops.
The rotor lands on the
touch down bearing at
approximately. 17,000
rpm.
"ALARM" The rotor stops on the
touch down bearing.
"ALARM" The STP pump decelerates
and stops.
"ALARM" The STP pump decelerates
and stops.
10-4
Probable causes of an
abnormality/error
operation
Power failure. Impossible
Power cable breakage.
Power cable disconnection.
STP connection cable Possible
breakage.
STP connection cable
disconnection.
Abnormal control circuit.
External vibration and Possible
impact.
Intrusion of atmospheric
air.
Intrusion of foreign
particles.
Leakage from the vacuum Possible
equipment or piping.
Insufficient pressure at
inlet and outlet port sides.
Failure of starting of the
backing pump.
Reset by
RESET