4
Principles of Operation
Vacuum purge
Pump probe
62
Table 6
Vacuum purge - Initial State: Idle
State
Vacuum Purging
Idle
Table 7
Pump probe - Initial State: Idle
State
Pumping Probe
Idle
Detaching Probe
Figure 25
on page 63 and
software state transition diagram
CryoBay order of operations/conditions
•
Turbo pump on (a high pitch hum may be heard -
this is normal.
•
Pump out CryoBay vacuum system until low
vacuum.
•
Turbo pump off.
•
Close valves
CryoBay order of operations/conditions
•
Turbo pump on (a high pitch hum may be heard,
this is normal).
•
Turbo pump reaches full speed.
•
Turbo pump continues to pump.
•
Pump out CryoBay vacuum system until low
vacuum.
•
Open probe valve (indicator will appear on probe
valve).
•
Pump out probe.
•
Continues until user clicks Detach.
•
Close probe vacuum valve (popup button on probe
valve will disappear).
•
Turbo pump off.
•
Continues with the Detach operation.
Figure 26
on page 64 show the
Cryogenic Systems Operation