JEOL JSM-IT200 Instructions Manual page 540

Index Term
S
Scanning Electron
Microscope
Specimen Chamber Scope
Straight Line
Secondary Electron
Secondary Electron
Detector
Secondary Electron Image
Switchboard
Semiconductor Detector
Semiconductor Element
Standard Specimen
Standard Data
Stereoscopic Image
Similar Colors
Serial analysis
T
TMP
Topographic Image
Tilting (Deflection)
Tilting Image
13-16
Description
SEM: Scanning Electron Microscope
When a thin electron probe is used to scan a specimen surface, this
device detects electrons and electromagnetic waves emitted from the
irradiation point on the electron probe and converts them to images. It
consists of an evacuation system to evacuate the column and specimen
chamber, a control system to perform various operations, a monitor and
recording system to record and display images, a specimen stage that
holds specimens, a detector to detect signals, and an electron optical
system that scans an electron probe.
This is a camera that detects infrared light or visible light and displays the
inside of the specimen chamber. Most scopes use CCD.
A measurement function. Measures the length of a straight line drawn on
the viewing screen.
This is an electron that is excited in a solid object and emitted in the
vacuum due to inelastic scattering of incident electrons. That energy is
generally defined as 50 eV or less. As the energy is small, electrons
occurring in the specimen are absorbed by the specimen and only
electrons occurring near the surface are emitted from the specimen
surface.
There are various types of detectors such as the ET detector used in a
high vacuum (see the "ET Detector" entry) and the low vacuum
secondary electron detector used in a low vacuum (see the "Low Vacuum
Secondary Electron Detector" entry). Generally, the secondary electron
detector used in a high vacuum is the Everhart-Thornley detector.
An image formed as an image signal of secondary electrons collected by
a secondary electron detector.
This is equipment that is between the power supply and load. It opens
and closes the electrical circuit, and switches the electrical systems. It
has various switches, electric meters, display lights, and the like
equipped on to it.
This is a detector that uses a semiconductor to receive backscattered
electrons emanating from the specimen and convert them into an image
signal.
Here, it refers to optical elements in the backscattered electron detector
that are semiconductor materials.
A specimen with a known composition. It is used when using standard
quantitation.
・Standard-less: Uses standard data built-in to the system to perform
quantitative calculations.
・Standard: Uses standard data created by the user to perform
quantitative calculations.
See "BED-S."
This function creates a color scheme by image brightness level. A
manual or automatic color scheme can be created.
This function performs spectrum acquisition consecutively on the
reserved spot with point and area analysis using an EDS.
An abbreviation of Turbo Molecular Pump. A pump that has many metal
blades diagonally attached to a cylinder and compresses and evacuates
gas by rotating the blades at high speed. While the operating pressure is
10-1 to 10-7 Pa, the compression rate of oil molecules is high, so it is
easy to create an oil-free environment. Unlike a diffusion pump, the pump
does not require cooling water nor does it require time to preheat and has
the merit of using less energy.
A type of backscattered electron image. Also called a TOPO image. The
image highlights specimen topographical data acquired by subtracting
the two channel signals in the center of the semiconductor backscattered
electron detector. Also a REF image acquired by a secondary electron
detector. (See "REF.")
Indicates the tilting correction (X, Y) for gun alignment.
An image that is acquired by tilting a specimen against a reference image
when creating anaglyph and 3D measurement images.
No. ISMIT200-1E