Name
Polarity of coordinates
(Rotation of knob)
Numerical value increases
(Clockwise)
Z-axis
Numerical value decreases
(Counterclockwise)
Plus direction
(Clockwise)
T-axis
Minus direction
(Counterclockwise)
※( )shows the manual operation.
No.ISMIT200-1E
T axis clockwise direction
T = 90 degree
The stage moves downward, and the working distance becomes
longer
The stage moves upward, and the working distance becomes
shorter
The stage is tilted toward the bottom of OL
The stage is moved to the horizontal direction
Z-axis
Z axis short WD
WD = 5 mm direction
Z axis long WD
WD = 48 mm direction
T axis counterclockwise direction
T = 0 degree
T-axis
Stage movement
5-43
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