JEOL JSM-IT200 Instructions Manual page 516

12.3.2 Motor drive stage
※Included an optional attachment.
General
The motor drive stage employs a combined unit of a JEOL motor-stage control board and an ATA motor drive
axes which are attached to the JEOL LGS stage. This stage can be controlled using the GUI screen. This
stage, installed on SEM, has a stage graphic display, and a function for moving the specimen to any
coordinates or position the operator specifies. This makes it easy to find the field of view, and improves the
ease of operation. In addition, this system can save the stage information in a stage file, making it easy to
reproduce the specimen positioning.
Specification
Specimen movement range
X
MP-01260MS 80mm
MP-01270MSR 80mm
MP-01280MSZ 80mm
MP-01290MS5 80mm
(-57 ～23)
Display range of GUI
Motor drive unit
X
○
MP-01260MS
○
MP-01270MSR
○
MP-01280MSZ
○
MP-01290MS5
X/Y
MP-01260MS 2.0 mm/s
MP-01270MSR 2.0 mm/s
MP-01280MSZ 2.0 mm/s
MP-01290MS5 2.0 mm/s
Standard accessories
Name
Holder
10 mmφ / 32 mmφ
32 mmφ×10 mmh×4 specimen blocks attached （one）
Spacer
Specimen
32 mmφ×5 mmh (one), 32 mmφ×10 mmh（one）
blocks
10 mmφ×5 mmh (five), 10 mmφ×10mmh（five）
12-14
Y R
40mm 360°
40mm 360°
40mm 360°
40mm 360°
(-15 ～25)
Endless
Y R
○
○ ○
○
○ ○
Maximum driving speed
R Z
－
12°/ s
1.0mm/s
12°/ s 1.0mm/s
Size and quantity
Z (WD) T
5－48mm 10-90°
5－48mm 10-90°
5－48mm 10-90°
10-90°
5－48mm
(5 ～48) (-10 ～90)
Z T
○
○ ○
T
Micro-Stepping Motor or equivalent
－
Built-in optical encoder or equivalent
－
Built-in limit switch for origin point correction
3°/s
MP-01260MS、MP-01270MSR
MP-01280MSZ、MP-01290MS5
The above MS is all common.
Note
(Beam center：X、Y＝0、0)
Eucentric specimen stage
Note
"○" shows that a manual control
knob is attached.
Note
Note
No.ISMIT200-1E