5.13.3 Stage Calibration
Although it will depend on how frequently the instrument is used, it is recommended to calibrate the stage at
least once per week. In addition, perform stage calibration if the following phenomena appear.
Stage coordinate display is different from the graphic display position
The specimen exchange position is shifted and the specimen cannot be exchanged
1.
Vent the specimen chamber to atmospheric pressure, and remove the specimen holder.
◆ CAUTION ◆
Remove the specimen, set the specimen height to 0mm.
If you do not, the following message appears, the stage calibration is not performed. Set the specimen height
to 0mm, and click the Execute button.
2.
Click the Stage icon from Settings.
The Stage Settings window is displayed.
3.
Select the axis to be calibrated, and click the Execute button.
The selected axis will start to move. The calibration is completed when the movement stops.
It is recommended to usually select All (all axes) and then execute the calibration..
No.ISMIT200-1E
5-79
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