JEOL JSM-IT200 Instructions Manual page 503

12.1 PERFORMANCE
12.1.1 Accelerating voltage
0.5 to 30 kV (53 steps)
(0.5 to 3 kV: variable in 100 V steps, 3 to 30 kV: variable in 1 kV steps)
12.1.2 Resolution
＜High vacuum mode＞
＜Low vacuum mode＞
12.1.3 Signal
＜High vacuum mode＞
＜Low vacuum mode＞
12.1.4 Magnification
Photo magnification：
Display magnification： ×14 ～ ×83.9724
12.1.5 Probe Current
1pA － 0.3μA
※When the MP-30060 is used, 1pA － 1μA
12.1.6 Pressure control range in specimen chamber
10-100 Pa
No.ISMIT200-1E
Acc. V
3.0 nm 30 kV
8.0 nm 3 kV
15.0 nm 1 kV
4.0 nm 30 kV
SEI（E.T detector）*
BEI（REF）（E.T detector）*
BEI（ composition, topographic, stereo/semiconductor ）
＊E.T：Everhart Thornley
BEI（ composition, topographic, stereo/semiconductor ）
LSEI（option）
×5～×300,000（149 steps in total）
（The display magnification is decided based on the 128 mm × 96 mm）
Image magnification on the monitor（The display magnification is decided based
on the 358mm × 269mm）
WD
8 mm SEI
6 mm SEI
6 mm SEI
BEI
5mm
specimen chamber pressure 10 Pa
12-1