JEOL JSM-IT200 Instructions Manual page 529

Index Term
C Compositional Image
Charging
Charge-free Scan
Conductive Treatment
Conductive Specimen
CRU
Cryo stage
D
Dead Time
Dwell Time
Digital Contrast
Digital Pulse Processor
Digital Brightness
Detector
Detector Holder
Deceleration Optics
Dynamic Focus
Display Magnification
E
E.T. Detector
No. ISMIT200-1E
Description
See "BED-C."
This is the phenomenon in which irradiating an insulating material
specimen with an electron beam builds up a charge on that specimen.
While viewing, noise occurs on the image and brightness is uneven.
See "CF Scan."
Specimen preparation in order to view nonconductive specimens. While
the main method to treat specimens is to coat the specimen surface with
metal coating, conductive staining is a method for biological and polymer
specimens. Note that excessive conductive treatment can change the
properties of fine structures.
A specimen has a low metal or electrical resistance.
See "Cryo stage"
A specimen stage for observing a specimen surface morphology at a low
temperature. The specimen is cooled with liquid nitrogen and can be
observed at temperature of about -130℃.
Dead time in the EDS detector. In order to convert the X-rays that
irradiate the detector to an electric signal and read the energy from the
electric signal, a finite time (time constant) is required. During that time, if
other X-rays are detected, energy cannot be correctly read, so the
detected X-rays and that amount of time is deleted. During that time, time
that cannot be measured in the EDS detector (dead time) occurs. If the
X-ray input count increases, the dead time increases, and the count for
the detected X-rays is lost.
The time to measure roughly one pixel during map or line analyses.
A function that digitally adjusts the contrast of saved images.
A processing system that determines detected X-ray energy by
converting X-ray signals detected by the EDS detector into digital signals
and analyzing them. It is also called an analyzer.
A function that digitally adjusts the brightness of saved images.
The unit that acquires various data, such as X-rays and secondary
electrons that emanate from the specimen, and coverts it to image
signals and the like.
A metallic part that secures the semiconductor element in the
backscattered electron detector.
A method used to acquire high resolution in low accelerating voltage. An
electron beam with a comparatively high accelerating voltage is slowed
down near the objective lens enabling a prescribed landing voltage to be
acquired. The difference between the accelerating voltage and retard
voltage is the landing voltage of the electron specimen. There are two
methods: A method to create a deceleration electric field between the
objective lens and specimen stage, and a method to create a
deceleration electric field by applying a retard voltage to the specimen
holder. This is also called a gentle beam.
By synchronizing with the electron probe scan and slightly changing the
focus, this function tilts the focus surface. It is used as a method to
correct focus misalignment greater than the focal depth in the tilt direction
when a flat specimen tilts greatly. It is also the name of the icon that starts
the function.
A magnification display method.
It refers to the actual size of the image and the size of the image being
displayed on the monitor.
A secondary electron detector used in a high vacuum that consists of a
collector that collects low-energy secondary electrons, a scintillator that
collides accelerated secondary electrons and changes them to a light
signal, and a photomultiplier tube that amplifies the light signal.
13-5