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JEOL JSM-IT200 Instructions Manual page 16

Scanning electron microscope

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Filament replacement
Never remove the top of the EOS cover while supplying a high voltage (HT ON).
The wehnelt is very hot immediately after the filament burnt out. Allow it to cool down
sufficiently (about one hour), then replace the filament with the removal tool.
Specimen stage movement
When the specimen holder is mounted on the stage, be sure to properly select the mounted
specimen holder from the UI, and enter the specimen height correctly.
If the mounted specimen holder is not properly selected, or you do not enter the correctly
specimen height, the specimen might collide with the objective lens or other component,
possibly causing damage.
Specimen holder
Do not use a dirty specimen holder.
Dirt on the specimen holder is a cause of charging. Moisten a lint-free wipe with a small amount
of alcohol or other suitable solvent and use this to wipe off the dirt. Dry the holder completely
after cleaning.
Specimen chamber O-rings
When removing a O-ring, use a tool like a toothpick and be careful to avoid damaging the
O-ring or surrounding metal surfaces.
Even a slight scratch or tiny bit of dust can cause degradation of the vacuum.
If there is any damage to the O-ring or O-ring contact surfaces, contact your JEOL service
office.
Printed surfaces, such as tables and sheet metal
If these surfaces become dirty, clean by gently wiping with a surfactant (commercially
available) or alkaline electrolyzed water.
Do not use solvents, such as alcohol, on the coated surfaces like tables and sheet metal. The
coated surfaces maybe altered or damaged.
Rotary pump
Confirm that the oil level is more than half by the oil level indicator.
Exchange the oil for the pump with fresh oil once per 1-2 years.
Contact your JEOL service office for details.

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