JEOL JSM-IT200 Instructions Manual page 504

12.2 SPECIFICATION
12.2.1 Electron Optics System
Applies to both high and low vacuum mode, except for Auto Gun Control
12.2.1.a Electron gun
Configuration
Electron source:
Gun Alignment coil:
Functions
Specimen bias voltage:
Line scan profile:
Auto gun control:
Beam blanking:
12.2.1.b Lens system
Configuration
Condenser lens:
Objective lens:
Objective-lens aperture:
Stigmator (astigmatism correction) coil:
Auto focus coil:
Functions
Lens reset:
Zoom function:
Wobbler:
Stigmator preset:
WD display
Auto focusing:
Auto focus tracer:
Tilt correction:
12-2
Pre-centered tungsten hairpin filament
Electromagnetic 2-stage deflection
Self-bias voltage
Filament heating auxiliary function
Automatic filament heating, automatic gun alignment adjustment.
full automatic (for HV mode only)
Prevents specimen damage
High precision zoom condenser lens
Conical type
1-step, Fine position adjustment along X and Y is possible
Electromagnetic 8-pole X-Y adjustment
For auto focus
For removing hysteresis
Prevention of changes in the focus when the irradiation current is changed
Axis alignment function for the objective lens aperture
(linked with magnification)
Linked with loading the stigma preset value, the acceleration voltage and
WD.
Displays working distance
Automatic focus adjustment
Tracing the focus that is linked with the stage Z coordinates.
(When an optional MSZ/MS5 is installed)
Correct the focus blur due to tilt of the specimen.
No.ISMIT200-1E