JEOL JSM-IT200 Instructions Manual page 304

7.1 IMPORTANT NOTICE OF EDS ANALYSIS

Avoid contacting the X-ray transmission window of the EDS detector
The extremely thin window is fragile. If the window is damaged, the performance of the detector will not
be utilized fully, requiring off-site repair.

Perform EDS analysis at the specified working distance (WD). If analysis is performed at the WD
different from the current WD, X-rays from areas other than the specified analysis position may be
detected, consequently interfering with the acquisition of accurate analytical results.

Use a conductive specimen, or perform the analysis under conditions that do not cause charging (ex: LV
mode). If the specimen becomes charged, X-rays from areas other than the specified analysis position
may be detected, consequently interfering with the acquisition of accurate analytical results.

Make the analyzed area of the specimen as horizontally level as possible. The uneven or tilted
specimen surface may interfere with the accurate detection of the X-ray in the specified field as well as
the analytical precision.

For quantitative analysis, the accelerating voltage of 10, 15, or 20 kV is recommended.

It is most preferable to use the KLM markers (used for quantitative analysis) that are set by default.
Selecting markers other than the ones set by default may cause inaccuracy.

Perform energy calibration periodically. If energy calibration is not performed for long periods of time,
the peak positions of X-rays may shift, interfering with the acquisition of accurate analytical results.

Use of "Live Time Scan" during map or line analysis is recommended.
"Live Time Scan" helps acquire distributions independent of dead time.
No.ISMIT200-1E
7-1