JEOL JSM-IT200 Instructions Manual page 536

Index Term
O
Opposed Dual EDS System
Objective Lens
Observation (Icon)
Observation range
Objective Lens Differential
Pumping
P
PC
PCD
Photo
Photo Data
PRE EVAC
PRZ
Primary Electron Beam
Picture Magnification
Periodic Table
Probe Current
Probe Current Detector
Point Analysis
Piston Valve
13-12
Description
This system reduces the time it takes to analyze by placing two EDS
detectors opposite each other with the specimen in the center, which
avoids shielding caused by specimen roughness and increases detection
efficiency.
This lens is positioned at the bottom of the electron optical system and
the electron probe scans the specimen surface with the final focus
performed by this lens. It is also known as a probe forming lens. It can
change the focal length by changing the excitation current. By making the
lens a conical shape, the specimen tilt and EDS detector can get near the
specimen.
Inscription on the icon to start viewing. Internally, this is the trigger that
applies the accelerating voltage.
The size of the displayed observation area. By varying the magnification,
the size of the viewing area also changes.
Normally, differential pumping is isolated by an orifice installed between
the specimen chamber and column, and is only the evacuating of the
specimen chamber and column by a different pump. However, this is a
pumping system installed so that a greater amount of pressure is
generated between the specimen chamber and column in order to set a
higher vacuum in the specimen chamber and maintain the electron gun at
a high vacuum by adding evacuation of the orifice between the top and
bottom poles of the objective lens.
An abbreviation of Probe Current. The probe current can be controlled in
1000 stages.
An abbreviation of Probe Current Detector. See "Probe Current
Detector."
A scan mode. Also name on the icon that selects the mode. This mode is
used when shooting high-definition images. This image freezes after one
screen is scanned. Select the Auto Save check box to automatically save
images to the specified folder.
This refers to SEM conditions, text, and other items appended to the
bottom of an image when shooting images.
A term that indicates the evacuation status. This is the state of rough
pumping the specimen chamber or column using a rotary pump.
A correction method used in quantitative analysis. In comparison to ZAF
correction, the accuracy of the atomic-number and absorption effects are
better by converting the depth distribution of the X-ray amount into a
model. Accurate correction can be expected for specimen compositions
for which the atomic-number significantly differs.
The electron beam that irradiates the sample.
A magnification display method.
Displays the actual size of the image and at a size of 128 mm × 96 mm.
The periodic table of elements.
The amount of current from the primary electron irradiating the specimen.
The current is controlled by the condenser lens excitation current and
objective lens aperture diameter. It is also the name of the window that
controls the excitation current of the condenser lens.
An optional device that has a Faraday cup. It is placed directly under the
objective aperture and measures the amount of electron beam current
that passed through the objective aperture.
This is a method of performing qualitative and quantitative analyses by
irradiating the electron probe on one point on the specimen. Note that no
matter how small the diameter of the electron probe is, as the electrons
on the specimen spread out, the analysis area is quite large.
By inserting a piston into the thin cylinder and overlapping the piston
shoulder with the cylinder axis hole, this valve changes and blocks the
passage area. The relationship between piston exhaust and scavenging
ports in two-stroke engines is also a category of piston valve, and this is
called the piston valve system. The piston valve also used to switch the
oil pressure passage for variable valve timing and the like.
No. ISMIT200-1E