5.10.9 Moving the stage using a coordinate file
1.
Click the
2.
Select the file with the desired coordinates.
3.
Click the Move button; then, click the Yes button in the message box that is displayed.
The stage moves to the specified coordinate position.
Saving coordinates
1.
Move the stage to the coordinates that you wish to save.
Check the coordinate position in the coordinate display area.
2.
Click the
The filename will be displayed (date and time). If necessary, change the filename.
3.
Click the OK button to save the coordinates.
No.ISMIT200-1E
button.
and Save Current Position button.
Coordinate display area
5-59
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