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High Vacuum Mode Observation (Be Image - JEOL JSM-IT200 Instructions Manual

Scanning electron microscope

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5.8.2 High vacuum mode observation (BE image)
The surface topology and composition distribution of a specimen can be observed by detecting the
backscattered electrons (BE) that contain the information about the specimen surface. Display the secondary
electron image first. Then, the BE image can be displayed smoothly.
※When the instrument is JSM-IT200 or JSM-IT200(A), the backscattered electron detector (BED: option) is
necessary.
The characteristics of the BE images are...
In the composition images, the light elements are displayed darker and the heavy elements are brighter.
For topology images, the surface features appear to be illuminated from the right side.
The convex portions are displayed brighter on the right side and darker on the left side. The concave
portions are displayed in an opposite manner.
1.
Mount a specimen and display the secondary electron image (SEI).
2.
Click the △ mark under Signal of photo data.
In the below figure, Click the △ mark under『SED』, and Signal windoe is displayed.
3.
Select a BE image.
Click one of the 3 modes; BED-C、BED-T、or BED-S.
The Gain setting and Level setting
BED-C:Composition image
BED-T:Topographic image
BED-S:Stereotopic image
2
Effective only when the BED-S is selected. The image can be displayed with a more three-dimensional appearance as the slide button is
dragged to the right.
No.ISMIT200-1E
2
tools are displayed by Clickping the『BED Advanced』button.
Slide button
5-17

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