JEOL JSM-IT200 Instructions Manual page 512

12.2.12 EDS Related
12.2.12.a
EDS monitoring
Displays and switches each status related to the EDS system.
Counting rate monitoring
Instrument adjustment
Spectrum monitoring
Displays spectra and qualitative elements during observation using SEM so that the elements
contained in the specimen can be checked.
Spectrum analysis
Measures an X-ray spectrum on a specified position or region and analyzes the spectrum.

Spectrum measurement
Region:
Termination condition:
Probe current measurement:
Energy range:

Spectrum display
Scale (horizontal axis):
Scale (vertical axis):
Element label:
Marker:
Comparison display:

Spectrum processing
Escape peak removal
Sum peak removal

Qualitative analysis
Automatic identification
Manual identification (peak identification)
Visual peak identification

Periodic table
12-10
Basic software
Indicates the counting rate (input and output) and the dead time
measured using the EDS hardware.
The user can adjust the instrument as necessary.
Whole, point, area, selected range
Real time, live time, ROI accumulation
Automatic (*1)
20 keV, 40 keV (10 eV/CH)
Linear
Linear, log, root
Element symbol + main line (K, L, M) + secondary line
(α, β,,,)
Main lines (K, L, M) and sub lines (α, β, ...) of
characteristic X-rays, escape, sum peak (A + A)
Multiple, thumbnail (Two spectra or more can be
compared.)
Escape peaks can be removed from spectra.
Sum peaks can be removed from spectra.
Up to 32 elements
Automatically identifies unknown spectra.
The peak position on the spectrum and the KLM marker
can be compared by selecting elements from the
candidate element list.
It is also possible to specify an element from the periodic
table.
Spectra of identified elements can be created for
comparison with the measured spectra.
Qualitative analysis can be checked visually and
numerically.
Use to check the elements detected through qualitative
analysis and specify elements for manual identification.
No.ISMIT200-1E