JEOL JSM-IT200 Instructions Manual page 535

Index Term
M
Map Analysis (Element
Mapping)
Manual (Icon)
Manual Adjustment Tool
Micron Bar
Micron Value
Main Control Panel
Main Breaker
Motor Driver
Monitoring Dialog Box
Montage
N
Navigation Image
Navigator Area
Net Count
Net Map
Non-conductive Sample
O
Oil Mist Trap
Oil Level
Overcurrent
Overfocus
Operation Panel
Operation Unit
Orifice
Optical Axis
No. ISMIT200-1E
Description
A two dimension distribution of elements can be obtained by scanning in
two dimensions with an electron microscope and measuring the
characteristic X-ray spectrum for each pixel.
An element distribution can be referred to by creating a map for each
element and arranging them in parallel or overlapping them.
In the IT200 Series, map analysis can be performed on the following
areas:
Full Size/ Area (any rectangle)
This icon displays the manual adjustment tool used when manually
adjusting image focus or brightness.
This tool is displayed when manually adjusting the viewing conditions
(such as focus and brightness).
A basic scale that is displayed on the GUI. It changes depending on the
magnification.
The length of the micron bar when the display is magnified.
Generally, this is a panel that manages all settings and states (including
software). For a SEM, this panel has key and button switches on the
column frame and front.
The breaker on the rear of the column frame.
It prevents accidents by automatically blocking the circuit if an abnormal
current flows into the device,
The board that controls the drive for the specimen stage motor.
⇒ For details, see the EDS Instruction Manual
The dialog box used to monitor spectrum acquisition.
This is a technique to connect multiple SEM images and acquire data
from a wide area. This technique is effective for viewing a field of view at
one time over an area wider than the one acquired at the lowest SEM
image magnification. By using a motorized stage, a montage can also be
created automatically. In addition to SEM image viewing, element
mapping over a wide area is also possible.
This is the saved image used in field of view selection in the stage
navigation system.
An area on the UI that the stage can be moved, display and save
snapshots, display specimen chamber scope images, operate stage
navigation, and other functions.
This is the count of characteristic X-ray peaks with the spectrum
background removed and separated into peaks.
A function that uses the net count and creates an element map.
This is a specimen that has an extremely high electrical resistance or is
insulating material.
An oil mist trap mounted on the rotary pump outlet port.
The amount of oil in the rotary pump. The level can be checked on the oil
level gauge on the rotary pump.
A state in which the filament-heating current or load current is greater
than required. It may decrease the filament lifespan.
The state in which the focus point is above in-focus (short WD side).
A control panel that enables focus, magnification, stage control, and other
functions to be operated with a knob. (Optional)
A computer to control the SEM. The SEM control program and other
applications are installed on it.
An aperture installed on the objective lens to set a pressure difference
between the specimen chamber and column (differential pumping) in low
vacuum mode.
The axis (line) that passes through the center of the lens.
It is different to a mechanical axis due to the pole piece and electrode
materials, machining accuracy, contamination in the column that occurs
through use, and so on. Electron beams that strike the optical axis on an
angle and from a distance are exposed to some sort of aberration.
13-11