Edwards nEXT 85 Turbomolecular Pump Manuals

Manuals and User Guides for Edwards nEXT 85 Turbomolecular Pump. We have 1 Edwards nEXT 85 Turbomolecular Pump manual available for free PDF download: Instruction Manual

Edwards nEXT 85 Instruction Manual (116 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 3 MB

Table of Contents
3
Safety and Compliance
8
Definition of Warnings and Cautions
8
Safety Symbols
9
Trained Personnel
9
Introduction
10
Overview
10
Pump Model Description
11
Motor Controller
11
Figure 1 Pump Model Description
11
Operational Features
12
Power Limit Setting
12
Standby Speed
13
Timer
13
Analogue Output
13
Automatic Vent Options
14
Normal Speed Setting
14
Electronic Braking
14
Logic Interface
15
USB Interface
15
Parallel Control and Monitoring
16
Serial Control and Monitoring
16
Serial Control with Parallel Monitoring
16
Parallel Control with Serial Monitoring or Serial Configuration
17
Motor Controller Configuration (Serial Configuration)
17
Technical Data
18
General Technical Data
18
Figure 2 Dimensions - Next85 ISO63
18
Figure 3 Dimensions - Next85 CF63
19
Figure 4 Dimensions - Next85 ISO100
19
Figure 5 Dimensions - Next85 DN40
19
Figure 6 Typical Base View
20
Figure 7 Dimensions - Next55D ISO63 NW16 80W
20
Operating and Storage Conditions
21
Figure 8 Dimensions - Next55D CF63 NW16 80W
21
Figure 9 Typical Base View
21
Vent Gas Specification and Vent Control Data
22
Purge Gas Specification
22
Figure 10: Maximum Allowed Rate of Pressure Rise During Venting: Pressure against Time (with Pump Initially at Full Rotational Speed)
22
Cooling Water
23
Electrical Data
24
Pumping Media
24
Figure 11 Maximum Relative Humidity to Avoid Condensation with Water Cooling
24
Materials Exposed to Gases Pumped
26
Logic Interface Connector
26
Motor Controller Auxiliary Connector Socket
29
Figure 12 Interface Circuits for Next Turbo Pump Controllers
29
Indicator Leds
31
Figure 13 Valve Connector
31
Pump Performance Data Next85
32
Figure 14 Next85 Pumping Speed Versus Inlet Pressure Performance Graph
33
Figure 15 Next85 Compression Ratio Versus Backing Pressure Graph
33
Pump Performance Data Next55
36
Figure 16 Next55 Pumping Speed Versus Inlet Pressure Performance Graph
37
Figure 17 Next55 Compression Ratio Versus Backing Pressure Graph
37
Installation
39
Unpack and Inspect
39
Figure 18 Typical Pumping System with a Next Pump
40
Connect to the Vacuum System
41
Remove and Replace the Inlet Screen
41
Mount the Pump
42
Backing Port Connection
44
Figure 19 Allowable Pump Orientation
44
Interstage Connection
45
Purge Gas Connection
45
Recommended Purge Gas Flow
45
Connect the Purge Gas
45
Electrical Installation
45
Ground the Connections
46
Connect the Logic Interface to the TIC or TAG
46
Connect the Logic Interface to the Control Equipment
46
Connect the Parallel Control and Monitoring
47
Connection for Serial Control and Monitoring
49
Connect the Serial Interface to the Customer Control Equipment
49
Figure 20 Logic Interface Connections - Parallel Control
49
Figure 21 Motor Controller Status Information
50
Serial Enable
51
Figure 22 Logic Interface Connections - RS232 Serial Control
51
Figure 23 Logic Interface Connections - RS485 Serial Control
51
Serial Protocol
52
Command Set
52
Multi-Drop Operation
56
Figure 24 Conceptual Diagram for Multi-Drop Connection Using RS232 Interface
57
Connection for Mixed Parallel and Serial Operation
58
Figure 25 RS485 Multi-Drop Connection
58
Cooling
59
Cooling Requirements
59
Figure 26 Logic Interface Connection - Mixed Parallel and Serial Operation
59
Forced Air Cooling
60
Water Cooling
60
Configuration
62
Configure the Pump Using Serial Commands
62
Message Structure
62
Command and Reply Table Definitions
63
Power Limit Setting
63
Power Supply to the Fan from the Motor Controller
64
Controlled Venting Options
64
Standby Speed Setting
65
Normal Speed Setting
66
Timer Setting and Options
66
Analogue Signal Options
67
Electronic Braking Options
68
Factory Settings
68
Assigning a Multi-Drop Address
68
Configure the Pump Using a TIC
69
Operation
71
Before Starting the Pump
71
Close the Vent Valve
71
Pre-Start Sequence
71
Vent Options, Vent Valve Connection and Control
72
Manual Vent Valve
72
TAV5 Solenoid Vent Valve
72
Vent Valve Control
73
Alternative Valve Connected to the Vacuum System
75
Operation with Parallel Control and Monitoring
75
Start the Pump
75
Figure 27 Auxiliary Interface Connection
75
Run the Pump at Standby Speed
76
Stop the Pump
76
Parallel Monitoring
77
Operation with Serial Control and Monitoring
77
Delayed Start
77
Start the Pump
77
Run the Pump at Standby Speed
78
Stop the Pump
78
Monitor Temperature Readings
78
Monitor Link Parameter Readings
79
Monitor Measured Motor Speed
79
Mixed Parallel and Serial Operation
79
Operation with a TIC or TAG
81
Decelerating and Venting
81
Figure 28 Serial and Parallel Control Flowchart
81
Operation at Extreme Conditions
82
Operation with High Inlet Pressure
82
Operation at High Temperatures
82
Protection against Over-Speed
82
Electrical Supply Failure
83
Bakeout
84
Shut down the Pump Manually
85
Maintenance
86
Bearing and Oil Cartridge Maintenance
86
Rotor Life
86
Cleaning the Pump
86
Decoding Service Status Words
87
Controller Run Time
88
Pump Run Time
88
Pump Cycles
88
Bearing Run Time
88
Oil Cartridge Run Time
89
Fault Finding
90
Command Set Error Codes
93
Flashing Service Codes
94
Flashing Error Codes
94
Decoding System Status Words
95
Service Information
97
Storage
99
Disposal
100
Service
101
Return the Equipment or Components for Service
101
Bearing and Oil Cartridge On-Site Maintenance
102
Spares
103
Inlet Screen
103
Inlet Strainer
103
Inlet Flange Seals and Integrated Inlet Screens
103
NW16 and NW25 Ports
104
Accessories
105
Air Cooler
105
Water Cooler
105
Figure 29 Accessories
105
Flange Heater
106
TAV5 Vent Valve
106
VRX Vent Restrictor
106
Vent Port Adaptor
107
PRX Purge Restrictor
107
Interface Cable
107
Nst PC Program
107
Auxiliary Connector
108
Auxiliary Extension Cable
108
Auxiliary 'Y' Cable Adaptor
109
Base Mounting Adaptor
109

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